CLEANROOM EQUIPMENT for

BACK-END, FRONT-END and INSPECTION  

Back-End > EPOXY DISPENSE - DIE ATTACH -- PLASMA CLEANING -- WIRE BONDING -- CLEAN ROOM FURNACES

Front-End > SPIN COATING AND WET PROCESSES, DIFFUSION FURNACES, DICING

INSPECTION TESTING -- DIE REWORK

DIE ATTACH AND DIE BONDING / RFID ASSEMBLY

WIRE BONDING

PLASMA CLEANING

EPOXY DISPENSE and DIE UNDERFILL

OVENS, FURNACES

RESIST COATING, SPINNING, WET PROCESSING OF SEMICONDUCTOR WAFERS

WIRE BOND TESTING EQUIPMENT

DIE INSPECTION EQUIPMENT

DIE / CHIP REWORK   

DIE BONDING  AND  MICROASSEMBLY SYSTEMS

 

 

 

 

  

  

           DR.TRESKY (Switzerland)

 

 

R&D Labs .... Equipment for Die Pick and Place, Die Attach, SMT, Hybrid, MCM, COB, Flip-Chip, Optoelectronic, Microsystemtechnic, and many more...

 

Die Bonder & Component Placer with Wafer Table and Die Ejector .... Manual model, Semi Automatic model,  Automatic model ...

 

Chip bonding in TO cans, laser bar stacking / destacking...

 

Hybrid Rework System (die removal by shear) to remove all glued dies from substrate.

    

 

Die Bonding and MicroPlacement                           Die Attach System                                   

Model T-3202                                                                  Model M-System1 (e.g. Epoxy Die Bonding)

Semi-Automated DIE bonder

 

• Placement accuracy <5µm

• Wafer table

• Unique DIE ejector system

• Automatic X+Y work table

• Integrated bond force measurement

• Heating systems

• High process repeatability

• Windows User Interface

 

Technologies:

 

• Thermo Compression

• Eutectic Bonding

• Dispensing

• Soldering

• Temperature Curing

• Ultrasonic

• Stacking

 

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   DATACON  BESI Group (Austria)

World Leader in Die Bonding and Flip Chip production technologies... Complete RFID production lines....

       Flip Chip Bonders       Die Bonders

Flip Chip Bonder 8800 FC Flip Chip Bonder with high volume and high accuracy
Flip Chip Bonder 8800 Chameo Multi-Flip Chip Bonder for Stacked Packages and SIP
Die Bonder 2200 EVO Twin-Head Multi-Chip Die Bonder with integrated dispenser and a die attach, flip chip applications (highest accuracy of 10µm @3s) --- Flexible and Versatile (Most popular model)
Die Sorter DS9000 Cassette to Cassette Die Sorting System
Die Sorter CS1250 High Speed Die Sorter for WLP and other Flipped Devices into Tape and Reel
Die Sorter DS9-100 Wafer to wafer Die Sorting for class 100 clean rooms.
Die Sorter DS11000 LED sorter with integrated vision inspection.
RFID Production Lines 8800 FC Smart Line Dedicated equipment for RFID production. An assembly solution based on reel-to-reel production. Upon completion, the RFID is spooled, optionally tested and slitted, and provided with bad marks for the rejects.

 

 

 

                                                                                      DATACON RFID Production Line

                                                                                       

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  F & K  DELVOTEC   (Austria, Germany) 

Delvotec Automatic Table-top Wire Bonders

56XX Series  :    All-in-One Wire Bonders and Testers

56xx Series is One Wire Bonding Equipment  with  different heads.

 

Each easily exchageable bonding heads (or testing heads) achieve the following wire bonding/testing in automatic (or semi-automatic) mode:  

  • Pull Test and Shear Test (Automatic or Manual) after Wire Bonding (with automatic pattern recognition) (5600C)

  • Ball Bonder - Ball-to-Wedge Wire Bonding (5610)

  • Wedge Bonder (Wedge-to-Wedge Wire Bonding) (5630)

  • Deep Access Wedge Bonder (5632)

  • Heavy Wire Bonder (5650)

  • Heavy Ribbon Bonder (5650HR)

  • Wire pull test, ball shear test, die shear test, tweezer tester (5600 P/S)

All  types of bonding and testing . . .  In one machine  . . .

It is easy to program and it operates with:

  • Gold Wires, Aluminium Wires, Heavy Ribbons

  • Automatic and semiautomatic operation (manual override, if needed)

  • Stitch mode and bumping mode available

The 56XX Series wire Bonder and Tester - brochure

 

More at Delvotec (Austria) website...

 

 

 

 

 

 

 

 

54xx Series - Semiautomatic Wire Bonders

53XX Series - Manual (budget) Wire Bonders (with programming assistance) : 5310, 5330, 53XX BDA

Stitch mode and bumping mode available

More at Delvotec (Austria) website...

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PLASMA TREATMENT SYSTEMS

 

 

 

 

 

   

  Nordson MARCH PLASMA  (USA, Holland) 

PLASMA CLEANING

Plasma processes (such as Plasma Cleaning) for advanced semiconductor packaging and assembly (ASPA),

wafer level packaging (WLP), microelectromechanical systems (MEMS)

Plasma Treatment Systems: AP-300, AP-600, AP-1000

for purposes such as plasma cleaning of the surfaces before wire bonding, etc (AP-600 brochure)

Reactive Ion Etching

Anisotropic RIE Plasma Systems: RIE-1701   (Product Brochure)

Affordable reactive ion etching (RIE) in a compact, bench-top configuration

 

Automated Plasma Treatment Systems:  FlexTrak series

 

 

UNDERFILL AND EPOXY DISPENSING Equipment

 

 

   

  ASYMTEK (USA, Holland) 

NORDSON ASYMTEK --- FLUID DISPENSING AND JETTING SYSTEMS

 

Semiconductor Dispensers

  • Die attach (e.g. silver epoxy)

  • Underfill for Flip chip and CSP 

  • Dam and fill

  • Thermal compounds

Spectrum S-820 -  Precision Batch Semiconductor Dispenser ( for underfill, cavity fill, die attach, and encapsulation.

                   

ASYMTEK - SPECTRUM S-820

Dispensers for High-speed, medium-speed and low-speed applications.

Very high speed Glue (Adhesive) Dispensing using jetting technology 

JETTING FLUIDS

Dispensing with Jetting Technology  compared to needle dispensing

D-9500 JET -- Typical applications for JET DISPENSING

  • Die attach materials, conductive adhesives and epoxies
  • Flip chip, chip scale package (CSP) & BGA Underfill
  • No-flow underfill Phosphor filled silicones for bright white LEDs
  • Thermal interfaces Stacked die adhesives
  • UV-cure adhesives
  • Conformal coating Fluids used for flat panel display assembly
  • Many fluids from 1 to 250,000 mPa (cps) .

In operation, the jet “flies” over the part or substrate, and shoots precise volumes of fluid in dots, lines and patterns. High flow rates up to 400 mg/second; high shot rate up to 200 dots per second; no Z-axis motion. Closedloop fluid heating ensures constant viscosity throughout the fluid path, even at the highest flow rates.

  • Jets in tight spaces as small as 175 µm.
  • Small fillet sizes as small as 250 µm.
  • Dot diameter as small as 200 µm.
  • Shot volumes as small as 1.0 nanoliter.
  • Jet stream size as small as 50 µm.
  • Slim design increases dispense area.

Inline full automatic dispensing equipment for high speed

JETTING WITH DJ9500 Brochure

Offline equipment for low speed applications:

DISPENSING SOLUTIONS for:

Semiconductor Packaging : Underfill for flip chip, selective flux jetting, BGA solder ball reinforcement, dam and fill dispensing, chip encapsulation, and cavity fill, die attach dispensing, lid seal, non-conductive paste and no flow underfill, thermal compounds, 3D packaging (stacked pakages, PoP, etc)

Electromechanical : MEMS assembly, RFID assembly, encapsulation and cavity fill, precise bonding, sealing, gasketing, precise lubrication, precise painting.

Life Science : Medical device assembly, medical electronics.


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FURNACES

 

 

 

 

ATV TECHNOLOGY (Germany)

   

 

Furnaces for semiconductor process (upto 1150o C)

Temperatures up to 1150°C, ±0.2°C, Fast ramping – Heats at 100°C/minute (max.), Fast cool down, Quartz process chamber, Up to 300mm diameter wafers or equivalent substrate size, Vacuum down to 5 x 10-6 mbar/Torr, Oxygen < 1 ppm, Multiple process gases.

DIFFUSION FURNACES

  • Poly Si, Si3N4and SiO2, LPCVD, diffusion with POCI3and BBr3

  • Diffusion with solid sources or spin-on coatings...

 

Annealing under N2, Ar, hydrogen, vacuum.

Thick film paste – LTCC processing

    
LTCC Sintering Press

Perfect Soldering/RTA Systems

Thermo Compression Bonders

Hot Plates/Chucks

Diamond Scribers

Manual Die Mounter

Thermocouple Wafers

Atomic Layer  Deposition Systems

 

 

 

FRESENBERGER (Germany)

Furnaces for laboratories, industrial furnaces, annealing chambers, climate ovens, incubators

Clean room ovens (from 250o C  to -80o C), forced air-circulating, temperature profiling (ramp up speed adjustable)

Furnaces with Temperatures up to 600o C (max 650o C)

Air-circulating ovens

LN2 cooling down to -150o C

Programmable temperature profiling with +/- 2o C accuracy (or +/- 1o C in limited ranges)

 

 

 

 

ATM GROUP (Germany)

Semiconductor processing equipment from laboratory scale up to fully automated assembly units for processing wafers or substrates for the semiconductor industry, opto-electronics, MEMs, photovoltaics, display technology and sensor systems.

ATM Process equipment for processes before lithography (e.g. resist coating spinners with controlled dispensing, etc)

to processes after lithography -- wet processing such as developing, cleaning and baking.

Spinning, coating, developing cleaning and drying systems for semiconductor process

  • Spin Coaters (with controlled and repeatable resist dispensing)

  • Wet Processing equipment to develop, clean and bake

  • Fully Customizable spinning and wet processing equipment according to customers' requirements

 

 

 

 

ATM Spin coating and Cleaning- OPTIspin ST22+

Stand - Alone Spinner System for Coating (e.g. resist), Cleaning or Developing applications

with hotplate for wafer up to Ø 8" (Ø 200 mm) and substrates up to 6" x 6" (150 mm x 150 mm)

 

 

 

 

Spin Coating- OPTIcoat ST23

Stand alone spinner for coating including process

The future technology in the semiconductor industry and production-
Stand-Alone Spin Coating System with "Covered Chuck", Hotplate and HMDS within process:

Stand - Alone Spin Coating System with "Covered Chuck" technology with Hotplate and HMDS Hotplate for Wafers up to Ø 8" (Ø 200 mm) and substrates up to 6" x 6" (150 mm x 150mm), for traditional open bowl or covered chuck spinning

 

 

 

 

 

OPTIcoat ST23 System consists of:

  • Stand - Alone cabinet with all process modules integrated
  • Spinner system with "Covered Chuck" technology and automatic substrate pin lift
  • Multi piece process bowl (easily dismountable for cleaning purposes) with splash ring
  • Hotplate OPTIhot HB 20 with lifting pins for 2" up to 8"
  • Vapor prime HMDS (HexaMethylDiSilazan) Hotplate OPTIhot VB 20
  • Input display unit with touch for spin coater and HMDS hotplate
  • Temperature controller and timer for hotplate
  • USB 2.0 port for data exchange
  • Including software for PC / Notebook - For more comfortable
    recipe writing and storage
  • Including an ENGLISH manual on standard paper and a CD-ROM
  • Price without installation and training
  • Requires at least one chuck (Not included !)

 

 

Spin Coating- OPTIcoat SB20

Bench Mounted Spin Coating System with "Covered Chuck" technology

for Wafers up to Ø 8" (Ø 200 mm) and substrates up to 6" x 6" (150 mm x 150 mm),

for traditional open bowl or covered chuck spinning

OPTIcoat SB20 System consists of:

  • Spinner system with "Covered Chuck" technology and automatic substrate pin lift
  • Multi piece process bowl (easily dismountable for cleaning purposes) with splash ring
  • 19" Controller unit with USB 2.0 port
  • Input display unit with touch
  • Including software for PC / Notebook - For more comfortable recipe writing and storage
  • Including an ENGLISH manual on standard paper and a CD-ROM
  • Price without installation and training
  • Requires at least one chuck (Not included !)

 

 

 

ATM Spin Wet- OPTIwet ST 60

Stand alone spinner for wet process

  • Stand - Alone Spin Wet Process System for wafer up to Ø 22” (Ø 560 mm) and substrates up to 16” x 16” (400 mm x 400 mm)

System consists of:

  • Stand - Alone cabinet with all process modules integrated
  • Process chamber made of polypropylene (PP) safety door
  • Including one programmable electronic media arm – Programmable in speed and position
  • Including Back Side Rinse nozzle for DI-Water
  • Emergency Stop Button
  • Input display unit with touch
  • USB 2.0 port for data exchange
  • Including software for PC / Notebook – For more comfortable recipe writing and storage
  • Including an ENGLISH manual on standard paper and a CD-ROM
  • Price without installation and training
  • Requires at least one chuck

 

 

 
 

Automatic Spin Coating- Maximus 806

The future technology in the semiconductor industry and production-
fully automatic and programmable cassette-to-cassette micro-cluster system:

Automatic Spin Coating and Developing System, with hotplates
for wafers sizes between Ø 4" up to Ø 8" (Ø 200mm) or
substrates up to 6" x 6" (150mm x 150mm)

 

 

 

Automatic Spin Coating- Maximus 806 System consists of:

  • 1 Cabinet MAXIMUS 806
  • 1 5-axis main robot
    - wafer transport between loading unit, spinner and hot /cool plate stack
  • 1 Loading Unit:
    - 4 cassette loading stations
    - 3-axis robot, carrying wafer from cassette to main robot
    - self centering end effector
  • 2 End effector vacuum standard for Ø 125mm and Ø 150mm wafer
  • 1 Flat touch screen monitor
  • 1 Computer as controller and user interface
  • 1 Light beacon (red , yellow , green )
  • 1 Remote control, for quick log file checking for service and maintenance purposes via modem or ISDN interface
  • 1 Software for easy programming of station recipe and flow recipe at the system or on a connected PC
  • 1 CE marked system
  • 1 ENGLISH manual on standard paper and a CD-ROM

 

For other ATM process equipment, please check the company website. ATM Group Products

 

 

 

 

 

TEST / INSPECTION SYSTEMS

 

 

WIRE BOND TESTING

 

DELVOTEC Automatic Bondtester 5600C

  • Automatic wire pull test
  • Automatic shear test
  • Fully programmable
  • Program transferable from Delvotec Wire Bonder

Pull Test Range:    100 cN, 10 N , 30 N, air bearing
Resolution 0.010 cN, 0.05 cN, 0.3 cN, 0.5cN

Shear Test Range   500 cN, 50 N, 500 N
Touch-Down set-up; Hot-Plug
Resolution 0.01CN, 0.5cN, 5.0cN

 

 

 

S.A.M.  SCANNING ACOUSTIC MICROSCOPES 

 

    SONOSCAN (USA)

World Leader in Non-Destructive internal inspection using Scanning Acoustic Microscopes (S.A.M.)

Acoustic Micro Imaging ...  Voids, delaminations in die attach...

MEMS inspection

D9500™ C-SAM©     The Gold Standard in Acoustic Microscopes

           

                                                                                                    Sonoscan D9500™ C-SAM© 

 

     
 
 

 

 

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X-Ray Inspection Equipment

 

       

  NIKON  X-TEK  (U.K., Belgium)) 

 

 X - RAY Inspection of Flip Chips and BGA components 

Real-time, true microfocus  X-RAY INSPECTION equipment with patented "open tube" technology.


 

XT-V 160 Nanotech Revolution : A revolution in PCB Inspection - Submicron resolution, strong xray penetration with 160 kV, amazing 75 degree oblique angle viewing...

BGA fault  Analysis  Software, dual monitor ... 

 

CT (Computer Tomography) analysis hardware & software is optional. Get a solid representation of slices and view them by rotating it.


 

XTEK also supplies high resolution vacuum de-mountable x-ray sources for the following applications:

 

BGA components

Electronic assemblies

PCB assembly

BGA solder joint inspection

IC Package Inspection

Automotive assemblies

Aerospace

Pharmaceutical Devices

NDT

Scientific and Research

Medical Research

Ordnance

XT V 130 -- New X-ray inspection system for electronics quality assurance.

30-130kV open micro-focus X-ray source, a 4-axis... Affordable but powerful.

Designed for 100% BGA and μBGA inspection, multi-layer board inspection and PCB solder joint inspection

  • In-house micro-focus source with 3-micron focal spot size

  • Change position, angle and zoom as desired

  • 4-inch image intensifier, optically coupled to a high-resolution digital CCD camera

  • Large set of 16-bit image processing tools

  • True 60° tilting angle for easy inspection of internal features

 

For more details, please check WEB Site:http://www.xtekxray.com

 

 

 

 

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OPTICAL Inspection WITH VIDEOSCOPES 

DIGITAL MICROSCOPES 

      TECHNOLAB   (Germany)
 

Inspect PCBs, BGAs, anything with digital microscopes (videoscopes), flexible endoscopes, thermoscopes....

 

 

   

 

Inspection Microscopes (Digital Camera Videoscopes) with X, Y,Z arms; Flexible endoscopes to inspect the solder balls under BGAs.... 

Xenon Cold Light Lamps, Thermo Inspection with Autofocus Infrared Camera, Image Processing and Archiving Software... 

For more details, please check TechnoLab WEB Site:http://www.technolab.de/_en/products/index.php

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