Automatic Spin Coating- Maximus 806
The future technology in the
semiconductor industry and production-
fully automatic and programmable cassette-to-cassette micro-cluster
system:
CLEANROOM EQUIPMENT for
BACK-END, FRONT-END and INSPECTION
Back-End > EPOXY DISPENSE - DIE ATTACH -- PLASMA CLEANING -- WIRE BONDING -- CLEAN ROOM FURNACES
Front-End > SPIN COATING AND WET PROCESSES, DIFFUSION FURNACES, DICING
INSPECTION TESTING -- DIE REWORK
DIE ATTACH AND DIE BONDING / RFID ASSEMBLY
TRESKY -- MicroAssembly, Die Attach and Bonding (Desktop semi-automatic or manual)
DATACON -- Die Bonding / Flip Chip Bonding / RFID Lines (High-Volume)
WIRE BONDING
DELVOTEC Wire Bonders - Automatic/Semiautomatic Wire Bonding equipmeent - Ball, wedge, deep access, ribbon, heavy wire bonding, wire testing
PLASMA CLEANING
NORDSON MARCH PLASMA -- Plasma Cleaning and Etching Equipment
EPOXY DISPENSE and DIE UNDERFILL
NORDSON ASYMTEK -- Epoxy Dispensers / Underfill dispensers
OVENS, FURNACES
ATV-TECH -- Diffusion Furnaces for semiconductors (1100o C), LTCC Sintering Presses
FRESENBERGER -- Furnaces (up to 600o C), Clean Room Ovens
RESIST COATING, SPINNING, WET PROCESSING OF SEMICONDUCTOR WAFERS
ATM Group -- Wet Processing equipment for semiconductor wafer processing, resist coating, spinning, baking
WIRE BOND TESTING EQUIPMENT
DELVOTEC -- Wire Bond pull and shear testers
DIE INSPECTION EQUIPMENT
SONOSCAN -- Acoustic Micro Imaging - SAM Scanning Acoustic Microscopes
NIKON XTEK -- XRay (BGA) Inspection Systems
TECHNOLAB -- Inspection Microscopes, Videoscopes, Endoscopes
DIE / CHIP REWORK
TRESKY -- Chip Removal (Die Shearer)
MIDAS -- De-Lidders for hermetically sealed hybrids
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DIE BONDING AND MICROASSEMBLY SYSTEMS
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DR.TRESKY (Switzerland) |
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R&D Labs .... Equipment for Die Pick and Place, Die Attach, SMT, Hybrid, MCM, COB, Flip-Chip, Optoelectronic, Microsystemtechnic, and many more...
Die Bonder & Component Placer with Wafer Table and Die Ejector .... Manual model, Semi Automatic model, Automatic model ...
Chip bonding in TO cans, laser bar stacking / destacking...
Hybrid Rework System (die removal by shear) to remove all glued dies from substrate.
Die Bonding and MicroPlacement Die Attach System Model T-3202 Model M-System1 (e.g. Epoxy Die Bonding) Semi-Automated DIE bonder
• Placement accuracy <5µm • Wafer table • Unique DIE ejector system • Automatic X+Y work table • Integrated bond force measurement • Heating systems • High process repeatability • Windows User Interface
Technologies:
• Thermo Compression • Eutectic Bonding • Dispensing • Soldering • Temperature Curing • Ultrasonic • Stacking
World Leader in Die Bonding and Flip Chip production technologies... Complete RFID production lines....
DATACON RFID Production Line
54xx Series - Semiautomatic Wire Bonders 53XX Series - Manual (budget) Wire Bonders (with programming assistance) : 5310, 5330, 53XX BDA
Stitch mode and bumping mode available More at Delvotec (Austria) website...
PLASMA TREATMENT SYSTEMS
PLASMA CLEANING Plasma processes (such as Plasma Cleaning) for advanced semiconductor packaging and assembly (ASPA), wafer level packaging (WLP), microelectromechanical systems (MEMS) Plasma Treatment Systems: AP-300, AP-600, AP-1000 for purposes such as plasma cleaning of the surfaces before wire bonding, etc (AP-600 brochure)
Reactive Ion Etching Anisotropic RIE Plasma Systems: RIE-1701 (Product Brochure) Affordable reactive ion etching (RIE) in a compact, bench-top configuration
Automated Plasma Treatment Systems: FlexTrak series
UNDERFILL AND EPOXY DISPENSING Equipment
FURNACES
Furnaces for semiconductor process (upto 1150o C) Temperatures up to 1150°C, ±0.2°C, Fast ramping – Heats at 100°C/minute (max.), Fast cool down, Quartz process chamber, Up to 300mm diameter wafers or equivalent substrate size, Vacuum down to 5 x 10-6 mbar/Torr, Oxygen < 1 ppm, Multiple process gases.DIFFUSION FURNACES
Annealing under N2, Ar, hydrogen, vacuum. Thick film paste – LTCC processing
Furnaces for laboratories, industrial furnaces, annealing chambers, climate ovens, incubators Clean room ovens (from 250o C to -80o C), forced air-circulating, temperature profiling (ramp up speed adjustable) Furnaces with Temperatures up to 600o C (max 650o C) Air-circulating ovens LN2 cooling down to -150o C Programmable temperature profiling with +/- 2o C accuracy (or +/- 1o C in limited ranges)
Semiconductor processing equipment from laboratory scale up to fully automated assembly units for processing wafers or substrates for the semiconductor industry, opto-electronics, MEMs, photovoltaics, display technology and sensor systems. ATM Process equipment for processes before lithography (e.g. resist coating spinners with controlled dispensing, etc) to processes after lithography -- wet processing such as developing, cleaning and baking. Spinning, coating, developing cleaning and drying systems for semiconductor process
ATM Spin coating and Cleaning- OPTIspin ST22+ Stand - Alone Spinner System for Coating (e.g. resist), Cleaning or Developing applications with hotplate for wafer up to Ø 8" (Ø 200 mm) and substrates up to 6" x 6" (150 mm x 150 mm)
Stand alone spinner for coating including process The future technology in the semiconductor industry and
production- Stand - Alone Spin Coating System with "Covered Chuck" technology with Hotplate and HMDS Hotplate for Wafers up to Ø 8" (Ø 200 mm) and substrates up to 6" x 6" (150 mm x 150mm), for traditional open bowl or covered chuck spinning
OPTIcoat ST23 System consists of:
Spin Coating- OPTIcoat SB20 Bench Mounted Spin Coating System with "Covered Chuck" technology for Wafers up to Ø 8" (Ø 200 mm) and substrates up to 6" x 6" (150 mm x 150 mm), for traditional open bowl or covered chuck spinning OPTIcoat SB20 System consists of:
ATM Spin Wet- OPTIwet ST 60 Stand alone spinner for wet process
System consists of:
![]() Automatic Spin Coating- Maximus 806 The future technology in the
semiconductor industry and production-
Automatic Spin Coating and Developing System, with hotplates
Automatic Spin Coating- Maximus 806 System consists of:
For other ATM process equipment, please check the company website. ATM Group Products
TEST / INSPECTION SYSTEMS
WIRE BOND TESTING
DELVOTEC Automatic Bondtester
5600C
S.A.M. SCANNING ACOUSTIC MICROSCOPES
World Leader in Non-Destructive internal inspection using Scanning Acoustic Microscopes (S.A.M.) Acoustic Micro Imaging ... Voids, delaminations in die attach... MEMS inspection D9500™ C-SAM© The Gold Standard in Acoustic Microscopes
Sonoscan D9500™ C-SAM©
X-Ray Inspection Equipment
OPTICAL Inspection WITH VIDEOSCOPES DIGITAL MICROSCOPES
Inspection Microscopes (Digital Camera Videoscopes) with X, Y,Z arms; Flexible endoscopes to inspect the solder balls under BGAs.... Xenon Cold Light Lamps, Thermo Inspection with Autofocus Infrared Camera, Image Processing and Archiving Software... For more details, please check TechnoLab WEB Site:http://www.technolab.de/_en/products/index.php |
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